hero-microelectronics

Microelectronics

  • Home
  • Microelectronics

With ever-increasing miniaturization and complexity, process requirements in microelectronics wet applications have become more and more stringent. A plethora of different media is necessary to cover the different processes in areas such as semiconductor manufacturing, photovoltaics, or LED. Ultrapure, safe, and reliable delivery of critical process media is of paramount importance.

Levitronix® has been a key participant in the Microelectronics industry for over 20 years, providing ultrapure pump systems, mixers, and flow sensors that enable chip manufacturers globally to process smallest wafer structures.

Process Overview

+ + + + + +

APPLICATIONS

Microelectronics

featured-image-bcd
Bulk Chemical Delivery
featured-image-cmp
CMP Slurry Delivery
featured-image-cleaning
Cleaning
featured-image-plating
Plating

Go to Products

featured-image-bps-family

Microelectronics Pumps

Ultrapure Bearingless Pump Systems

Microelectronics Pumps (Solvent Applications)

Anti-Static Bearingless Pump Systems

Microelectronics Pumps (High Temperature)

Water Cooled Bearingless Pump Systems

featured-image-bps-first-generation-family

Microelectronics Pumps (First Generation)

Ultrapure Bearingless Pump Systems

featured-image-bps-if-family

Microelectronics Flow Controllers

Ultrapure Bearingless Flow Controllers

Microelectronics Inline Flow Sensors

PFA Ultrasonic Inline Flow Sensors

Microelectronics Clamp-On Flow Sensors

Non-Invasive Ultrasonic Flow Sensors for PFA Tubing

Microelectronics Pump Tank Mixers

Simultaneous Mixing and Pumping

Pressure Boosting System

Turnkey Pressure Boosting and Control

Microelectronics Fans

Chemical Resistant Bearingless Fans

Downloads

Overview Brochure: Levitronix Pump Systems for Semiconductor Manufacturing