Managing process integrity starts with the liquids that come in direct contact with the wafer. With ever-increasing miniaturization, the requirements for the purity of bulk chemicals as well as their supply systems are dramatic.
Compared to pumps, pressurized vessels bear a water hammer risk that can cause particle release from filters and safety concerns. Among all pump systems for semiconductor manufacturing, Levitronix^® pumps have become the industry standard for ultrapure wet applications as the absence of a mechanical bearing leads to virtually no particle generation.
Levitronix^® pump systems are designed for demanding bulk chemical delivery applications where ultrapure and safe processing will ensure the highest yield.