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LFS Ultrasonic High-Precision Flow Measurement for Microelectronics Wet Applications

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LEVIFLOW® inline flow sensors are designed for high-precision flow measurement of ultrapure liquids. Two piezoelectric transducers generate and receive ultrasonic waves. When flow is present, the with-stream wave is accelerated, and the against-stream wave is slowed down. The difference in transit time is proportional to the velocity of the fluid. The measurement is completely non-invasive and therefore ideal for ultrapure liquids. With the liquid completely encapsulated in high-performance plastic resins, the sensor is also extremely resistant against the harshest chemicals. Furthermore, selected sensors are available for high temperature applications.
The LEVIFLOW® inline sensors are compatible with either a single-channel converter, or a multi-channel converter for up to 6 sensor connections.
From low to high flow rates, handling ultrapure water through to aggressive chemistries, LEVIFLOW® inline sensors will help improve your yield!

Levitronix® – better sensors for better yield!

Company Levitronix