The Levitronix® BPS-iF100 is designed for ultrapure processing of delicate fluids in microelectronic wet applications. The motor and pump controller, as well as the flow converter, are integrated into the driver housing resulting in a significantly reduced footprint. Based on active magnetic levitation, the pump impeller is suspended and driven by the magnetic field of the motor. The wide gap ensures that there is no mechanical contact between moving parts and therefore no wear. There are no bearings to wear out or seals to break down. The impeller and casing are both made from chemical-resistant high purity fluorocarbon resins.
Proven by industry experience – The purest pump within semiconductor manufacturing (and beyond)!
Since there is no mechanical coupling between the impeller and the pump head casing, there is no wear and therefore virtually no particle generation.
Significantly lower than air-operated pumps
The wet surface area of a Levitronix® pump is several times smaller than in comparison to pneumatic pumps of comparable hydraulic power.
Extremely high reliability
There are no bearings to wear out or seals to break down, therefore equipment uptime increases massively, which extends the life of the process equipment and reduces maintenance costs.
Accurate, stable and reliable flow and pressure for your process
The open pump head design, high flow resolution, centrifugal pump principle and the absence of valves lead to a completely pulsation-free flow.
Substantially smaller than air-operated pumps
The highly integrated design of the pump, motor, and flow converter combined with the absence of a mechanical bearing results in a system that greatly reduces the space requirements and allows for installation in confined spaces.
Ideal for Slurry and delicate plating liquids
The smooth wetted plastic surfaces and the absence of a mechanical bearing, narrow gaps, fissures and dead-zones allow for gentle processing of sensitive liquids.
No more flow throttling – Highly accurate flow and pressure
Due to it’s variable speed and high resolution, the Levitronix® pump allows precise control of flow or pressure over a wide operating range.
More than 25 years experience
Levitronix® pumps are firmly established in highly demanding industries beyond semiconductor manufacturing such as biopharmaceutical production.
Smart pumps for smart manufacturing
Levitronix® pumps allow high-performance data acquisition, ideal for predictive maintenance and for factory wide system integration.
Substantially less noise than with pneumatic pumps
Since there is no mechanical coupling of the impeller and the pump casing, the pump produces virtually no vibrations resulting in a very quiet operating pump system.
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