The Levitronix® LEVIBOOST™ is designed to deliver sufficient and constant pressure. Comprised of an ultrapure bearingless pump and a pressure transducer, the LEVIBOOST™ not only increases pressure but also compensates for fluctuations by actively monitoring and controlling the pressure output. This ensures always the right pressure at the point-of-use. Designed as a turnkey solution for subfloor installation, the LEVIBOOST™ requires minimal footprint and infrastructure modifications.
Independent from variations in water consumption and supply
A pressure transducer monitors the current tool incoming pressure and transmits the actual value to the pump controller. This allows for compensation of supply pressure fluctuations and pressure variations caused by individual water consumption of the process tools in line.
Up to 115 lpm at 2.5 bar
With its high performance, the LEVIBOOST™ 140 can generate a maximum pressure of more than 4 bar and a maximum flow rate of 140 lpm.
The purest pump within semiconductor manufacturing (and beyond)!
Since there is no mechanical coupling between the impeller and the pump head casing, there is no wear and therefore virtually no particle generation.
Minimal footprint and modification required
The ultra-compact design allows for easy sub-floor installation with minimal modification required.
生物工艺 
微电子 
Flow Controllers 
Flow Sensors 
Mixers 
Fans 
Pressure Booster 
Process Control Units 
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