Levitronix^® High-Temperature PumpsWater-Cooled Bearingless Pumpsfor MicroelectronicsWet Applications

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微电子泵（高温）

The Levitronix^®high-temperature pumps are designed for ultrapure processing of delicate fluids in microelectronic wet applications. The integrated water cooling loop ensures that the inside temperature of the motor remains at low temperature when pumping hot chemicals.Based on active magnetic levitation, the pump impeller is suspended and driven by the motor’s magnetic field. The wide gap ensures there is no mechanical contact between moving parts and, therefore, no wear. There are no bearings to wear out or seals to break down. The impeller and casing are both made from chemical-resistant high purity fluorocarbon resins.

Levitronix^® high-temperature pumps offer distinctive advantages in microelectronic wet applications that will improve your product yield.

High Temp (1)

Benefits

The Purest Pump

Proven by industry experience - The purest pump within semiconductor manufacturing (and beyond)!

Since there is no mechanical coupling between the impeller and the pump head casing, there is no wear and therefore virtually no particle generation.

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Particle size distribution measured downstream of large pump systems at 5gpm and 40 psig

Very Low Trace Metal Contamination

Significantly lower than air-operated pumps

The wet surface area of a Levitronix^® pump is several times smaller than in comparison to pneumatic pumps of comparable hydraulic power.

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Trace metal extraction of three Levitronix pumps compared to two diaphragm pumps

Low Shear Design

Ideal for Slurry and delicate plating liquids

The smooth wetted plastic surfaces and the absence of a mechanical bearing, narrow gaps, fissures and dead-zones allow for gentle processing of sensitive liquids.

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Effect of pumps on particles ≥ 0.56 µm (linear scales)

Pulsation Free Flow

Accurate, stable, and reliable flow and pressure for your process

The open pump head design, high flow resolution, centrifugal pump principle, and the absence of valves lead to a pulsation-free flow.

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Retention efficiency as a function of pressure pulsation

Up to 220° C liquid temperatureThe integrated water cooling loop ensures that the inside temperature of the motor remains at low temperature when pumping hot chemicals.

Ideal for Hot Chemicals

No more flow throttling – highly accurate flow and pressureDue to its variable speed and high resolution, the Levitronix^® pump allows precise control of flow or pressure over a wide operating range.

High Controllability and Wide Flow Range

Extremely high reliabilityThere are no bearings to wear out or seals to breakdown, therefore equipment uptime increases, extending the life of your process equipment and reducing maintenance costs.

Highest MTBF (>100 years)

Widest flow range – From ultra low flow to maximum flowThe high speed and resolution of a Levitronix^® pump allows to control and maintain the flow from a few ml/min up tothe maximum flow rate.

Highest Turndown Ratio

Substantially smaller than air operated pumpsThe highly integrated design of the pump and motor combined with the absence of a mechanical bearing results in a system that greatly reduces the space requirements and allows for installation in confined spaces.

Small Footprint

Smart Pumps for Smart ManufacturingLevitronix^® pumps allow high-performance data acquisition, ideal for predictive maintenance and for factory wide system integration.

Constant Data Acquisition and Condition Monitoring

Substantially less noise than with pneumatic pumpsSince there is no mechanical coupling of the impeller and the pump casing, the pump produces virtually no vibrations resulting in a very quiet operating pump system.

Low Noise and Low Vibration

Create a feedback loopIntegrate a flow or pressure sensor into your pump system and create a feedback loop which will allow you to automatically maintain your desired process conditions.

Integrated Flow Controller

More than 25 years experienceLevitronix^® pumps are firmly established in highly demanding industries beyond semiconductor manufacturing such as biopharmaceutical production.